Low-resistance ohmic contacts on boron-doped {113} oriented homoepitaxial diamond layers
P. Hazdra, Alexandr Laposa, Z. Šobáň, J. Voves, N. Lambert, Marina Davydova, Vojtěch Povolný, Andrew Taylor, V. Mortet
Topics & Concepts
Ohmic contactMaterials scienceContact resistanceDiamondAnnealing (glass)OverlayerDopingEpitaxyElectrical resistivity and conductivitySchottky barrierBoronTitaniumOptoelectronicsMetallurgyComposite materialNanotechnologyLayer (electronics)Condensed matter physicsChemistryElectrical engineeringEngineeringDiodeOrganic chemistryPhysicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesMetal and Thin Film Mechanics