Effect of a seed layer on microstructure and electrical properties of Ga2O3 films on variously oriented Si substrates
Keyun Gu, Zilong Zhang, Ke Tang, Jian Huang, Yi Shang, Yue Shen, Meiyong Liao, Linjun Wang
Topics & Concepts
Materials scienceMicrostructureThin filmSurface roughnessAnnealing (glass)Substrate (aquarium)Layer (electronics)FabricationSurface finishOptoelectronicsComposite materialNanotechnologyOceanographyPathologyMedicineGeologyAlternative medicineGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques