Structure with thin SiOx/SiNx bilayer and Al electrodes for high-frequency, large-coupling, and low-cost surface acoustic wave devices
Junyao Shen, Sulei Fu, Rongxuan Su, Huiping Xu, Weibiao Wang, Zengtian Lu, Qiong Feng, Fei Zeng, Cheng Song, Feng Pan
Topics & Concepts
Surface acoustic waveMaterials scienceWidebandOptoelectronicsFabricationCoupling (piping)AcousticsBilayerInsertion lossElectrodeElectronic engineeringComposite materialPathologyMedicinePhysicsAlternative medicineMembraneEngineeringBiologyGeneticsChemistryPhysical chemistryAcoustic Wave Resonator TechnologiesFerroelectric and Piezoelectric MaterialsMechanical and Optical Resonators