Performance of flexible CeO2 composite abrasive in force rheological polishing of fused silica glass
Mengqing Liu, Jinhu Wang, Hongchen He, Julong Yuan, Binghai Lyu, Hongyu Chen, Guangjian Peng
Topics & Concepts
Materials sciencePolishingAbrasiveRheologyComposite numberComposite materialChemical-mechanical planarizationAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research