A combined molecular dynamics/Monte Carlo simulation of Cu thin film growth on TiN substrates: Illustration of growth mechanisms and comparison with experiments
Reza Namakian, Brian Novak, Xiaoman Zhang, W. J. Meng, Dorel Moldovan
Topics & Concepts
TinMaterials scienceThin filmSputter depositionSubstrate (aquarium)WettingCopperDeposition (geology)Monte Carlo methodWetting layerLayer (electronics)Molecular dynamicsCrystallographySputteringMetallurgyComposite materialNanotechnologyChemistryComputational chemistryGeologySedimentMathematicsStatisticsPaleontologyOceanographyMetal and Thin Film MechanicsCopper Interconnects and Reliabilitynanoparticles nucleation surface interactions