A Low-Voltage, Low-Current, Digital-Driven MEMS Mirror for Low-Power LiDAR
Dingkang Wang, Lenworth Thomas, Sanjeev J. Koppal, Yingtao Ding, Huikai Xie
Abstract
Microelectromechanical (MEMS) mirrors have provided a fast and compact method to modulate light for mobile-scale projectors, LiDAR, and computational cameras. In this letter, we propose a new MEMS mirror design and its actuation method that is specifically built for low-voltage, low-current, and digital-driven IoT applications. The MEMS mirror specifically designed with direct actuation from the microcontroller was successfully fabricated and characterized. A full low-power LiDAR system based on the fabricated MEMS mirror was demonstrated, which was powered by a 9-V commercial battery.
Topics & Concepts
Microelectromechanical systemsMicrocontrollerLow voltageLidarVoltagePower (physics)Battery (electricity)Electrical engineeringComputer scienceMaterials scienceOpticsOptoelectronicsComputer hardwareEngineeringPhysicsQuantum mechanicsAdvanced MEMS and NEMS TechnologiesAdvanced Optical Sensing TechnologiesPhotonic and Optical Devices