Depth-profiling analysis of ZnO layers with three morphologies by direct-current glow discharge mass spectrometry
Lei Huang, Zeng Wang, Rong Qian, Shangjun Zhuo, Zheming Gu, Anqi Liu, Jie Gao, Qiao Chen
Topics & Concepts
Materials scienceNanorodSputteringGlow dischargeFabricationHydrothermal circulationZincAnalytical Chemistry (journal)Direct currentSputter depositionOptoelectronicsThin filmMetallurgyNanotechnologyChemical engineeringPlasmaChemistryVoltageChromatographyPhysicsEngineeringQuantum mechanicsPathologyMedicineAlternative medicineIon-surface interactions and analysisMass Spectrometry Techniques and ApplicationsAnalytical chemistry methods development