Miniaturized CO<sub>2</sub> Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector
Doris K. T. Ng, Linfang Xu, Weiguo Chen, Huanhuan Wang, Zhonghua Gu, Xavier X. Chia, Yuan Hsing Fu, Norhanani Jaafar, Chong Pei Ho, Tan‐Tan Zhang, Qingxin Zhang, Lennon Y. T. Lee
Abstract
gas sensors based on pyroelectric detectors, which could possibly be integrated with consumer electronics for real-time air quality monitoring.
Topics & Concepts
PyroelectricityDetectorOptoelectronicsMaterials scienceAbsorption (acoustics)WaferStack (abstract data type)Gas detectorAnalytical Chemistry (journal)OpticsChemistryPhysicsComposite materialDielectricChromatographyFerroelectricityProgramming languageComputer scienceGas Sensing Nanomaterials and SensorsAcoustic Wave Resonator TechnologiesSpectroscopy and Laser Applications