β-Ga2O3 hetero-junction barrier Schottky diode with reverse leakage current modulation and BV2/Ron,sp value of 0.93 GW/cm2
Qinglong Yan, Hehe Gong, Jincheng Zhang, Jiandong Ye, Hong Zhou, Zhihong Liu, Shengrui Xu, Chenlu Wang, Zhuangzhuang Hu, Qian Feng, Jing Ning, Chunfu Zhang, Peijun Ma, Rong Zhang, Yue Hao
Abstract
In this paper, we show that high-performance β-Ga2O3 hetero-junction barrier Schottky (HJBS) diodes with various β-Ga2O3 periodic fin widths of 1.5/3/5 μm are demonstrated with the incorporation of p-type NiOx. The β-Ga2O3 HJBS diode achieves a low specific on-resistance (Ron,sp) of 1.94 mΩ cm2 with a breakdown voltage of 1.34 kV at a β-Ga2O3 periodic fin width of 3 μm, translating to a direct-current Baliga's power figure of merit (PFOM) of 0.93 GW/cm2. In addition, we find that by shrinking the β-Ga2O3 width, the reverse leakage current is minimized due to the enhanced sidewall depletion effect from p-type NiOx. β-Ga2O3 HJBS diodes with p-type NiOx turn out to be an effective route for Ga2O3 power device technology by considering the high PFOM while maintaining a suppressed reverse leakage current.