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Study on the crack formation mechanism in nano-cutting of gallium arsenide

Chenghao Chen, Min Lai, Fengzhou Fang

2020Applied Surface Science52 citationsDOI

Topics & Concepts

Materials scienceGallium arsenideBrittlenessArsenideComposite materialAmorphous solidDislocationDeformation (meteorology)MetallurgyCrystallographyOptoelectronicsChemistryAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials Research
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