Facilitating Complex Thin Film Deposition by Using Magnetron Sputtering: A Review
Jie Li, Guang‐Kun Ren, Jiahui Chen, X. Chen, Wenjie Wu, Yinke Liu, Xiaohong Chen, Jiangfeng Song, Yuanhua Lin, Yan Shi
Topics & Concepts
Sputter depositionMaterials scienceThin filmFabricationDeposition (geology)SputteringOptoelectronicsNanotechnologyHigh-power impulse magnetron sputteringAdaptabilityEngineering physicsProcess engineeringElectronic engineeringEngineeringSedimentAlternative medicinePathologyPaleontologyEcologyMedicineBiologyZnO doping and propertiesSemiconductor materials and devicesMetal and Thin Film Mechanics