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Low surface damage laser processing of silicon by laser-induced plasma etching (LIPE)

Robert Heinke, Martin Ehrhardt, Jens Bauer, Andriy Lotnyk, Pierre Lorenz, Roy Morgenstern, Thomas Lampke, Thomas Arnold, K. Zimmer

2022Applied Surface Science13 citationsDOI

Topics & Concepts

Materials scienceSiliconEtching (microfabrication)Laser ablationLaserIsotropic etchingX-ray photoelectron spectroscopyPlasmaRaman spectroscopyOptoelectronicsOpticsNanotechnologyLayer (electronics)Chemical engineeringPhysicsEngineeringQuantum mechanicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials Research
Low surface damage laser processing of silicon by laser-induced plasma etching (LIPE) | Litcius