Polishing of fused silica by laser-enhanced plasma at the atomic and close-to-atomic scale
Peng Lyu, Jiyu Pan, Ze Liu, Fengzhou Fang
Topics & Concepts
PolishingAtomic unitsLaserMaterials sciencePlasmaScale (ratio)Atomic physicsMetallurgyOpticsPhysicsNuclear physicsQuantum mechanicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques