Atomically control of surface morphology in Ga2O3 epi-layers with high doping activation ratio
Dangpo Wang, Jianing Li, Anning Jiao, Xinchuang Zhang, Xiaoli Lu, Xiaohua Ma, Yue Hao
Topics & Concepts
DopingMaterials scienceDopantMolecular beam epitaxyEpitaxyAtomic layer depositionAnalytical Chemistry (journal)Electron mobilityPulsed laser depositionOptoelectronicsLayer (electronics)Thin filmNanotechnologyChemistryChromatographyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques