Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si
Hongbo Ju, Luyao Xu, Jing Luan, Yaoxiang Geng, Junhua Xu, Lihua Yu, Junfeng Yang, Filipe Fernandes
Topics & Concepts
TinMaterials scienceTitanium nitrideAnnealing (glass)Amorphous solidSputter depositionSputteringNanocompositeComposite numberMetallurgyNitrideChemical engineeringComposite materialThin filmLayer (electronics)NanotechnologyCrystallographyChemistryEngineeringMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchCopper Interconnects and Reliability