Progress in Modeling of III-Nitride MOVPE
M. Dauelsberg, Р.А. Талалаев
Topics & Concepts
Metalorganic vapour phase epitaxyGallium nitrideEpitaxyNitrideMaterials scienceChemical vapor depositionChemistryChemical physicsNanotechnologyLayer (electronics)GaN-based semiconductor devices and materialsMetal and Thin Film MechanicsSemiconductor Quantum Structures and Devices