Mobility enhancement of indium-gallium oxide via oxygen diffusion induced by a metal catalytic layer
Si‐Hyung Lee, Sueon Lee, Seong Cheol Jang, Nuri On, Hyun‐Suk Kim, Jae Kyeong Jeong
Topics & Concepts
IndiumMaterials scienceGalliumOxideAnnealing (glass)MetalLayer (electronics)OxygenCatalysisChemical engineeringChemical physicsNanotechnologyOptoelectronicsChemistryMetallurgyOrganic chemistryBiochemistryEngineeringThin-Film Transistor TechnologiesZnO doping and propertiesTransition Metal Oxide Nanomaterials