Bayesian decision analysis for optimizing in-line metrology and defect inspection strategy for sustainable semiconductor manufacturing and an empirical study
Chen–Fu Chien, Tran Hong Van Nguyen, Yi-Chiu Li, Ying‐Jen Chen
Topics & Concepts
MetrologySemiconductor device fabricationReliability engineeringManufacturing engineeringEngineeringSampling (signal processing)Wafer fabricationQuality (philosophy)ProductivityIndustrial engineeringComputer scienceProcess engineeringSystems engineeringWaferElectrical engineeringMacroeconomicsEpistemologyEconomicsStatisticsPhilosophyMathematicsFilter (signal processing)Industrial Vision Systems and Defect DetectionManufacturing Process and OptimizationAdvanced Statistical Process Monitoring