Thermal management for microelectronic chips under non-uniform heat flux with supercritical CO2
Hao Huang, Yuling Zhai, Zhouhang Li, Yifan Li, Hua Wang, Hua Wang
Topics & Concepts
Supercritical fluidMicroelectronicsMaterials scienceHeat fluxFlux (metallurgy)Thermal management of electronic devices and systemsThermalNuclear engineeringMechanicsProcess engineeringThermodynamicsHeat transferNanotechnologyMechanical engineeringPhysicsMetallurgyEngineeringHeat Transfer and OptimizationHeat transfer and supercritical fluidsThermal properties of materials