Study of the surface chemistry, surface morphology, optical, and structural properties of InGaN thin films deposited by RF magnetron sputtering
D.A. Granada-Ramírez, A. Pulzara‐Mora, Camilo Pulzara-Mora, A. Pardo-Sierra, J.A. Cardona-Bedoya, M. Pérez-González, S. A. Tomás, S. Gallardo‐Hernández, J. G. Mendoza-Álvarez
Topics & Concepts
X-ray photoelectron spectroscopyThin filmMaterials scienceCrystalliteSputter depositionPhotoluminescenceSubstrate (aquarium)Analytical Chemistry (journal)SputteringSurface roughnessBand gapSiliconChemistryOptoelectronicsNanotechnologyChemical engineeringMetallurgyComposite materialGeologyOceanographyChromatographyEngineeringGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsZnO doping and properties