Atomic layer deposition: An efficient tool for corrosion protection
Lionel Santinacci
Topics & Concepts
Atomic layer depositionMicroelectronicsCorrosionNanotechnologyMaterials scienceFabricationDeposition (geology)Layer (electronics)Thin filmEngineering physicsMetallurgyEngineeringGeologyMedicineSedimentAlternative medicinePaleontologyPathologySemiconductor materials and devicesElectronic and Structural Properties of OxidesZnO doping and properties