Rapid fabrication of surface microstructures on AlN HTCC substrate by chemically assisted laser ablation
Xinlei Zhang, Ni Chen, Jinming Wu, Jiawei Wei, Bo Yan, Liang Li, Ning He
Topics & Concepts
Materials scienceDielectricMicrostructureLaser ablationSurface roughnessLaserSubstrate (aquarium)Thermal conductivityAblationPower densityFabricationNitrideLaser power scalingSurface modificationSurface finishCeramicComposite materialDielectric lossOptoelectronicsOpticsChemical engineeringPower (physics)Alternative medicineGeologyOceanographyEngineeringPhysicsQuantum mechanicsMedicineAerospace engineeringLayer (electronics)PathologyMetal and Thin Film MechanicsAdvanced ceramic materials synthesisSemiconductor materials and devices