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Abrasive machining induced surface layer damage behavior and formation mechanism of monocrystalline β-Ga2O3: A comparative study of nanoindentation and nanogrinding

Shang Gao, Xin Yang, Xiaoguang Guo, Jiawei Ren, Renke Kang

2023Materials Characterization12 citationsDOI

Topics & Concepts

Monocrystalline siliconMaterials scienceNanoindentationIndentationAbrasive machiningMachiningComposite materialMetallurgySiliconGa2O3 and related materialsMetal and Thin Film MechanicsAdvanced ceramic materials synthesis
Abrasive machining induced surface layer damage behavior and formation mechanism of monocrystalline β-Ga2O3: A comparative study of nanoindentation and nanogrinding | Litcius