Deep transfer Wasserstein adversarial network for wafer map defect recognition
Jianbo Yu, Shijin Li, Zongli Shen, Shijin Wang, Changhui Liu, Qingfeng Li
Topics & Concepts
Computer scienceTransfer of learningArtificial intelligenceDeep learningGenerative adversarial networkKey (lock)Domain (mathematical analysis)WaferArtificial neural networkAdversarial systemMachine learningSemiconductor device fabricationGenerative grammarDeep neural networksCross entropyData miningPattern recognition (psychology)EngineeringMathematicsMathematical analysisComputer securityElectrical engineeringIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques