Preparation of lanthanide-doped polystyrene/CeO2 abrasives and investigation of slurry stability and photochemical mechanical polishing performance
Yongyu Fan, Jie Jiao, Lang Zhao, Jinkui Tang
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyPhotocatalysisChemical-mechanical planarizationPolishingDopingSlurryChemical engineeringPolystyreneLanthanideWaferRaman spectroscopyNanotechnologyComposite materialOptoelectronicsCatalysisChemistryOpticsIonPolymerOrganic chemistryPhysicsEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchElectronic and Structural Properties of Oxides