Design and development of a MEMS vibrating ring resonator with inner rose petal spring supports
Imran Khan, David S.‐K. Ting, Mohammed Jalal Ahamed
Topics & Concepts
ResonatorFabricationMicroelectromechanical systemsStiffnessSurface micromachiningResonance (particle physics)AcousticsFinite element methodGyroscopeMaterials scienceEngineeringElectronic engineeringStructural engineeringElectrical engineeringOptoelectronicsPhysicsPathologyParticle physicsMedicineAlternative medicineAerospace engineeringAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies