The first progress of plasma-based transition metal dichalcogenide synthesis: a stable 1T phase and promising applications
Hyeong‐U Kim, Hyunho Seok, Woo Seok Kang, Taesung Kim
Abstract
An insight into the synthesis of 2-dimensional transition metal dichalcogenides (TMDs) and classification of the phases with various synthesis methods. Herein, the 1T phase of TMDs is reviewed with a unique synthetic method with cold plasma (plasma enhanced CVD).
Topics & Concepts
Materials scienceChemical vapor depositionGrapheneWaferPlasma-enhanced chemical vapor depositionSubstrate (aquarium)NanotechnologyThin filmChemical engineeringPhase (matter)ChemistryOceanographyOrganic chemistryEngineeringGeology2D Materials and ApplicationsMXene and MAX Phase MaterialsGraphene research and applications