Litcius/Paper detail

UV-curable polyimide/layered silicate films with improved barrier properties for the protection of semiconductor chips

Joshua Lommes, Gesa Patzelt, Volkmar Stenzel

2023Microelectronic Engineering15 citationsDOI

Topics & Concepts

PolyimidePermeationMaterials scienceSilicateNanocompositeCoatingExfoliation jointChemical engineeringMoistureFourier transform infrared spectroscopyComposite materialLayer (electronics)GrapheneMembraneNanotechnologyChemistryEngineeringBiochemistrySilicone and Siloxane ChemistryPolymer Nanocomposites and PropertiesAnalytical Chemistry and Sensors