Frequency splitting of hemispherical resonators trimmed with focused ion beams
Changhong Wang, Youhuan Ning, Yan Huo, Lishan Yuan, Wei Cheng, Zhen Tian
Topics & Concepts
ResonatorVibrationAcousticsTrimmingOpticsAzimuthFundamental frequencyFrequency responseMaterials sciencePhysicsEngineeringMechanical engineeringElectrical engineeringAcoustic Wave Resonator TechnologiesAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and Applications