Litcius/Paper detail

Surface protection of SS-316L with boron nitride based thin films using radio frequency magnetron sputtering technique

Mukhtiar Singh, Hitesh Vasudev, Maninder Singh

2022Journal of Electrochemical Science and Engineering24 citationsDOIOpen Access PDF

Abstract

In the present work, the radio frequency (RF) magnetron sputtering process was used to develop boron nitride thin films on 316L stainless steel. The target material used in the experiment was a hexagonal boron nitride (c-BN) target. The deposition was performed in three different Ar and N2 system mixing regimes. The composition and morphology of the coating developed at various N2 and Ar plasma ratios were investigated using scanning electron microscopy (SEM) and X-ray diffraction (XRD) techniques. The electrochemical corrosion test was used to investigate the boron nitride coating's corrosion behaviour. The goal was to study the changes in the ratio of N2 and Ar during the process and to understand the structure of cubic boron nitride (c-BN) coatings. Increased microstruc­ture uniformity and further c-BN step creation with different quantities (Q) QAr/QN2 = 2 imply a fundamental strategy for creating improved cubic boron nitride films.

Topics & Concepts

Boron nitrideMaterials scienceSputter depositionCoatingScanning electron microscopeBoronNitrideThin filmCorrosionSputteringMetallurgyAnalytical Chemistry (journal)OptoelectronicsNanotechnologyLayer (electronics)Composite materialChemistryOrganic chemistryChromatographyBoron and Carbon Nanomaterials ResearchMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research