Ultrasensitive Airflow Sensors Based on Suspended Carbon Nanotube Networks
Qinyuan Jiang, Run Li, Fei Wang, Xiaofei Shi, Fengxiang Chen, Ya Huang, Baoshun Wang, Wenshuo Zhang, Xueke Wu, Fei Wei, Rufan Zhang
Abstract
Abstract High‐performance airflow sensors are in great demand in numerous fields but still face many challenges, such as slow response speed, low sensitivity, large detection threshold, and narrow sensing range. Carbon nanotubes (CNTs) exhibit many advantages in fabricating airflow sensors due to their nanoscale diameters, excellent mechanical and electrical properties, and so on. However, the intrinsic extraordinary properties of CNTs are not fully exhibited in previously reported CNT‐based airflow sensors due to the mixed structures of macroscale CNT assemblies. Herein, this article presents suspended CNT networks (SCNTNs) as high‐performance airflow sensors, which are self‐assembled by ultralong CNTs and short CNTs in a one‐step floating catalyst chemical vapor deposition process. The SCNTN‐based airflow sensors achieved a record‐breaking short response time of 0.021 s, a high sensitivity of 0.0124 s m −1 , a small detection threshold of 0.11 m s −1 , and a wide detection range of ≈0.11–5.51 m s −1 , superior to most of the state‐of‐the‐art airflow sensors. To reveal the sensing mechanism, an acoustic response testing system and a mathematical model are developed. It is found that the airflow‐caused intertube stress change resulted in the resistance variation of SCNTNs.