MEMS sensor based on MOF-derived WO3-C/In2O3 heterostructures for hydrogen detection
Mengmeng Guo, Na Luo, Yue‐Ling Bai, Zhenggang Xue, Qingmin Hu, Jiaqiang Xu
Topics & Concepts
HeterojunctionMaterials scienceMicroelectromechanical systemsDetection limitHydrogen sensorPorosityHydrogenOperating temperatureOptoelectronicsMetalLayer (electronics)NanotechnologyChemical engineeringComposite materialChemistryPalladiumCatalysisElectrical engineeringChromatographyMetallurgyOrganic chemistryEngineeringGas Sensing Nanomaterials and SensorsTransition Metal Oxide NanomaterialsAnalytical Chemistry and Sensors