Theoretical and experimental research into a novel method of cluster magnetorheological finishing based on a circular array polishing disk
Bin Luo, Qiusheng Yan, Jingfu Chai, Wenqing Song, Jisheng Pan
Topics & Concepts
PolishingChemical-mechanical planarizationMaterials scienceWaferMagnetorheological fluidShear forceComposite materialAbrasiveSurface roughnessShear (geology)Surface finishOptoelectronicsMechanical engineeringStructural engineeringEngineeringDamperAdvanced Surface Polishing TechniquesAdhesion, Friction, and Surface InteractionsAdvanced machining processes and optimization