Litcius/Paper detail

Bubble detection in photoresist with small samples based on GAN augmentations and modified YOLO

Guang Yang, Chunhe Song, Zhijia Yang, Shuping Cui

2023Engineering Applications of Artificial Intelligence27 citationsDOI

Topics & Concepts

PhotoresistWaferComputer scienceBubbleArtificial intelligenceMaterials scienceOptoelectronicsNanotechnologyLayer (electronics)Parallel computingAdvanced Neural Network ApplicationsIndustrial Vision Systems and Defect DetectionImage Enhancement Techniques
Bubble detection in photoresist with small samples based on GAN augmentations and modified YOLO | Litcius