Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode
Zinan Zhao, Nian Li, Yilin Qu, Weiqiu Chen
Topics & Concepts
Materials scienceResonatorVibrationCoupling (piping)WavenumberNormal modeCoupling strengthDispersion (optics)Low frequencyMode (computer interface)Acoustic dispersionSpectral lineMode couplingAcousticsOpticsOptoelectronicsCondensed matter physicsComposite materialPhysicsOperating systemComputer scienceAstronomyAcoustic Wave Resonator TechnologiesMechanical and Optical ResonatorsFerroelectric and Piezoelectric Materials