Plasma surface treatment of amorphous Ga2O3 thin films for solar-blind ultraviolet photodetectors
Bohan Xiao, Baohong Liu, Xiyao He, Chengyu Li, Zheng Liang, Yi-Chen Sun, Qijin Cheng
Topics & Concepts
Materials scienceArgonPassivationThin filmAmorphous solidHydrogenOptoelectronicsResponsivityPhotodetectorSputteringAnalytical Chemistry (journal)ChemistryLayer (electronics)NanotechnologyChromatographyOrganic chemistryGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques