Fabrication of inverted pyramid structure for high-efficiency silicon solar cells using metal assisted chemical etching method with CuSO4 etchant
Danni Zhang, Shuai Jiang, Ke Tao, Rui Jia, Huayun Ge, Xinpu Li, Bolong Wang, Minghui Li, Zhuoyu Ji, Zhibo Gao, Zhi Jin
Topics & Concepts
WaferIsotropic etchingMaterials scienceSiliconEtching (microfabrication)Quantum efficiencySolar cellOptoelectronicsFabricationSubstrate (aquarium)MicrostructureNanotechnologyComposite materialLayer (electronics)Alternative medicineMedicineOceanographyGeologyPathologySilicon and Solar Cell TechnologiesNanowire Synthesis and ApplicationsThin-Film Transistor Technologies