Achieving superlubricity and high adhesion strength of hydrogenated amorphous carbon film with Al/Cr/Si-doping
Quansheng Ma, Yongqiang Fu, Yi Xu, Tianbao Ma, Tianbao Ma
Topics & Concepts
Materials scienceHigh-power impulse magnetron sputteringAmorphous carbonDopingAmorphous solidGraphiteCarbon fibersNanotechnologyCarbon filmComposite materialTribologyThin filmAdhesionSputter depositionChemical engineeringSputteringOptoelectronicsChemistryCrystallographyComposite numberEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsLubricants and Their Additives