Thickness dependent native oxidation kinetics observation and prediction for Cu films using spectroscopic ellipsometry
Jiamin Liu, Hao Jiang, Lin Zhang, Honggang Gu, Xiuguo Chen, Shiyuan Liu
Topics & Concepts
EllipsometryOxideX-ray photoelectron spectroscopyMaterials scienceExponential functionInverseAnalytical Chemistry (journal)CrystalliteKineticsLogarithmTransmission electron microscopyThin filmChemistryMathematicsPhysicsNuclear magnetic resonanceNanotechnologyMathematical analysisGeometryMetallurgyChromatographyQuantum mechanicsCopper-based nanomaterials and applicationsZnO doping and propertiesFluid Dynamics and Thin Films