A Review on Micro/Nanoforming to Fabricate 3D Metallic Structures
Jie Xu, Xinwei Wang, Chuanjie Wang, Lin Yuan, Chen Wanji, Jianxing Bao, Qian Su, Zhenhai Xu, Chunju Wang, Zhenlong Wang, Debin Shan, Bin Guo
Abstract
With the rapid development of micro-electromechanical systems (MEMS), micro/nanoscale fabrication of 3D metallic structures with complex structures and multifunctions is becoming more and more important due to the recent trend of product miniaturization. As a promising micromanufacturing approach based on plastic deformation, micro/nanoforming shows the attractive advantages of high productivity, low cost, near-net-shape, and excellent mechanical properties, compared with other non-silicon-based micromanufacturing technologies. However, micro/nanoforming is far less established due to the so-called size effects in terms of materials models, process laws, tooling design, etc. The understanding of basic issues on micro/nanoforming is not yet mature, and it is currently a topic of rigorous investigation. Here, a systematic review on the micro/nanoforming processes of 3D structures with multifunctional properties is presented, wherein also a critical examination of the interplay between relevant length scales and size effects affecting the structural integrity of micro/mesoscale metallic systems is also provided. Finally, the challenges of micro/nanoscale fabrication are proposed, including the development trends of new micro/nanoforming processes, multiple field coupling effects, and theoretical modeling at the trans-scale.