Low temperature (<150 °C) annealed amorphous indium-gallium-tin oxide (IGTO) thin-film for flash memory application

Zeli Wang, Hongwei Xu, Yuanju Zhang, Hyeon Cheol Cho, Jae Kyeong Jeong, Changhwan Choi

2022Applied Surface Science13 citationsDOI

Topics & Concepts

Amorphous solidGalliumIndiumMaterials scienceIndium tin oxideTinFlash (photography)Thin filmOptoelectronicsOxideMetallurgyNanotechnologyChemistryCrystallographyOpticsPhysicsThin-Film Transistor TechnologiesSemiconductor materials and devicesTransition Metal Oxide Nanomaterials

Low temperature (&lt;150 °C) annealed amorphous indium-gallium-tin oxide (IGTO) thin-film for flash memory application

Topics & Concepts

Low temperature (<150 °C) annealed amorphous indium-gallium-tin oxide (IGTO) thin-film for flash memory application