Industrial scale deposition of well adherent superhard and low friction C-DLC coatings grown by HIPIMS and anode assisted unbalanced magnetron sputtering
Wolf‐Dieter Münz, Thorsten Zufraß
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceCathodeAnodeCoatingSputter depositionComposite materialSubstrate (aquarium)Cavity magnetronPhysical vapor depositionDeposition (geology)Diamond-like carbonGraphiteCarbon fibersLayer (electronics)Cathodic arc depositionMetallurgySputteringThin filmNanotechnologyElectrodeCathodic protectionComposite numberSedimentPaleontologyPhysical chemistryGeologyOceanographyBiologyChemistryDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsBoron and Carbon Nanomaterials Research