Mg-doped beta-Ga2O3 films deposited by plasma-enhanced atomic layer deposition system for metal-semiconductor-metal ultraviolet C photodetectors
Shao‐Yu Chu, Tsung‐Han Yeh, Ching-Ting Lee, Hsin-Ying Lee
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyDopingAnalytical Chemistry (journal)PhotoluminescenceUltravioletAtomic layer depositionGalliumElectronegativityLayer (electronics)OptoelectronicsNanotechnologyChemical engineeringChemistryMetallurgyOrganic chemistryChromatographyEngineeringGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques