Performance of multifunctional antibacterial moisture barrier films with different Zn/Al ratios fabricated by plasma enhanced atomic layer deposition
Ji‐Ho Eom, Tae‐Yeon Cho, Seong‐Keun Cho
Topics & Concepts
Composite numberMaterials scienceAtomic layer depositionTransmittanceAntibacterial activityRefractive indexZincAluminiumOxideThin filmChemical engineeringNuclear chemistryComposite materialNanotechnologyChemistryMetallurgyOptoelectronicsGeneticsBacteriaEngineeringBiologyZnO doping and propertiesSemiconductor materials and devicesGa2O3 and related materials