New pull-in voltage modelling of step structure RF MEMS switch
K. Girija Sravani, K. Srinivasa Rao, Koushik Guha
Topics & Concepts
Microelectromechanical systemsCapacitanceVoltageElectronic engineeringMaterials scienceSilicon nitrideRadio frequencyElectrical engineeringSiliconEngineeringOptoelectronicsElectrodePhysicsQuantum mechanicsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators