Litcius/Paper detail

Direct micropatterning on a titanium surface through electrochemical imprint lithography with a polymer electrolyte membrane stamp

Pengfei Jia, Ryohei Umezaki, Junji Murata

2022Microelectronic Engineering15 citationsDOI

Topics & Concepts

Materials scienceElectrolyteMicrostructureContact angleTitaniumChemical engineeringAnodeMicropatterningScanning electron microscopeLithographyNanotechnologyElectrochemistryComposite materialMetallurgyElectrodeChemistryOptoelectronicsEngineeringPhysical chemistryNanofabrication and Lithography TechniquesMetal and Thin Film MechanicsPolymer Surface Interaction Studies
Direct micropatterning on a titanium surface through electrochemical imprint lithography with a polymer electrolyte membrane stamp | Litcius