A 1×20 MEMS mirror array with large scan angle and low driving voltage for optical wavelength-selective switches
Yan An, Boqian Sun, Peng Wang, Lei Xiao, Huan Liu, Huikai Xie
Topics & Concepts
Microelectromechanical systemsMultiplexerMaterials scienceOptical switchActuatorOpticsBimorphVoltageWavelengthOptoelectronicsComb driveMultiplexingFabricationElectrical engineeringPhysicsEngineeringAlternative medicineMedicinePathologyPhotonic and Optical DevicesSemiconductor Lasers and Optical DevicesAdvanced Fiber Optic Sensors