Correlation between electrical properties and growth dynamics for Si-doped Al-rich AlGaN grown by metal-organic chemical vapor deposition
Baiyin Liu, Fujun Xu, Jiaming Wang, Jing Lang, Liubing Wang, Xuzhou Fang, Xuelin Yang, Xiangning Kang, Xinqiang Wang, Zhixin Qin, Weikun Ge, Bo Shen
Topics & Concepts
CathodoluminescenceMaterials scienceDopingDopantGrowth rateChemical vapor depositionAnalytical Chemistry (journal)MetalChemistryNanotechnologyOptoelectronicsMetallurgyGeometryLuminescenceMathematicsChromatographyGaN-based semiconductor devices and materialsSemiconductor materials and devicesGa2O3 and related materials