Simple and cost-effective microfabrication of flexible and stretchable electronics for wearable multi-functional electrophysiological monitoring
Chae Hyun Kim, Dong Hyeon Lee, Jiman Youn, Hong-Je Lee, Joonsoo Jeong
Abstract
The fabrication of flexible and stretchable electronics is a critical requirement for the successful application of wearable healthcare devices. Although such flexible electronics have been commonly fabricated by microelectromechanical system (MEMS) technologies, they require a specialised equipment for vacuum deposition, photolithography, and wet and dry etching. A photolithography-free simple patterning method using a desktop plotter cutter has been proposed; however, the metal formation and electrode opening still rely on the MEMS technology. To address this issue, we demonstrate a simple, rapid, cost-effective, and a complete microfabrication process for flexible and stretchable sensor platforms encompassing conductor formation and patterning to encapsulate and open sensing windows, which only require an economic plotter cutter and readily available supplies. Despite its simplicity, the proposed process could stably create microscale features of 200 μm wide conductor lines and 1 mm window openings, which are in the useful range for various wearable applications. The feasibility of the simple fabrication of multi-functional sensors for various physiological monitoring applications was successfully demonstrated in electrochemical (glucose), electrical (electrocardiogram), mechanical (strain), and thermal (body temperature) modalities.