Microstructure and properties of TiAlCrN ceramic coatings deposited by hybrid HiPIMS/DC magnetron co-sputtering
Binhua Gui, Hui Zhou, Jun Zheng, Xingguang Liu, Xingguo Feng, Yanshuai Zhang, Lamaocao Yang
Topics & Concepts
Materials scienceHigh-power impulse magnetron sputteringCeramicSputter depositionMicrostructureComposite materialCoatingNucleationSputteringToughnessThin filmNanotechnologyChemistryOrganic chemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchIon-surface interactions and analysis